ME.3 - MEMS-GC with Integrated Heater for Ion Trap Mass Spectrometer
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- MEMS-based Sensing
- Author(s)
- P. Hesketh, T. Chang, D. Struk, M. Navaei, D. Dimandja - School of Mechanical Engineering, Georgia Institute of Technology, Atlanta (USA), V. Doroshenko, V. Laiko, E. Moskovets, K. Novoselov - MassTech Inc., Columbia (USA)
- Pages
- 417 - 418
- DOI
- 10.5162/IMCS2018/ME.3
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
In this work a microfabricated 6 meter long gas chromatography column has been integrated with a platinum resistive heater and installed in an ion-trap mass spectrometer. The system is for the detection and identification of volatile organic compounds. The system was demonstrated to separate a mixture of sixteen volatile organic compounds with a maximum temperature of 150 ºC.