ME.4 - Flexible Microplasma Discharge Device for the Detection of Biochemicals
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- MEMS-based Sensing
- Author(s)
- A. Bose, D. Maddipatla, B. Narakathu, V. Turkani, B. Bazuin, M. Atashbar - Department of Electrical and Computer Engineering, Western Michigan University, Kalamazoo, Michigan (USA)
- Pages
- 419 - 420
- DOI
- 10.5162/IMCS2018/ME.4
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
A microplasma discharge device was fabricated for the detection of biochemicals. The device was fabricated on a flexible polyimide substrate. Silver (Ag) ink was deposited using screen printing process on one side of the substrate, as top electrode. The Ag electrodes were encapsulated by spray coating an acrylic layer. Copper tape, as bottom electrode, was attached to the opposite side of the substrate. The capability of the fabricated device was demonstrated by investigating its optical response toward different concentrations of sodium chloride (NaCl) test analyte. Peaks for sodium ions (Na+) and chloride ions (Cl-) was registered at around 600 nm and 750 nm, respectively, in the optical spectra for 1 mM and 100 mM NaCl solutions. The details of the fabrication and the microplasma discharge device response is presented in this paper.