P1GS.13 - Tungsten Oxide Films with High Sensitivity to Nitric Oxide
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- P-1 - Gas Sensors
- S. Krutovertsev, A. Tarasova, O. Ivanova, L. Krutovertseva - JSC “Ecological sensors and systems”, Moscow, Zelenograd (Russia)
- 543 - 544
The subject of the study was to determine the tungsten oxide films’ sensitivity to nitric oxide of the ppb level. High sensitive films development of chemical sensors for NO detection at low level can have practical application for advanced solutions in medicine. Films were obtained by two different methods: thick-film technology and by thermal sputtering in vacuum. The investigations were carried out under the sensor thermal stabilization conditions in the range 50 - 350 °C. The nitric oxide concentrations were measured in a range of 1 - 100 ppb. A temperature impulse mode effect on a sensitive layer was used for detection of NO low concentrations in the model gas mixtures.