P1GS.22 - Tin Oxide Gas Sensor on Tin Oxide Microheater for Methane Sensing
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- P-1 - Gas Sensors
- M. Moalaghi, M. Gharesi, A. Ranjkesh - Electronic Materials Laboratory, Electrical Engineering Department, K.N. Toosi University of Technology, Tehran (Iran)
- 560 - 561
Despite the ever increasing demand for methane detection in residential and industrial locations, the common tin oxide-based methane sensors fail to satisfy the quality requirements for long-term operation in harsh environs. Particularly, the RuO2 microheaters utilized in these sensors deteriorate in reducing atmospheres and cannot provide the high temperatures required for methane detection in a long-time period. Here, we disclose a tin oxide gas sensor complete on a tin oxide microheater which can stably operate at temperatures as high as 850 °C. Both components are produced by ultrasonic spray pyrolysis of tin chloride solution on alternative sites of an alumina chip. Thermally stable electrical contacts are formed by diffusion bonding of gold wire segments onto the SnO2 films. The response of the fabricated sensor to different methane concentrations is examined at operation temperatures in the 500-850 °C range. The device can detect 50 ppm of methane in normal atmosphere with a response time of 10 s, demonstrating suitability of the introduced sensor for online leakage detection applications.