D6.1 Topography Analysis in the NPMM-200
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Measurement Science
- D6 Advanced Methods and Measurement Systems
- E. Meta, E. Manske - Technische Universität Ilmenau, Ilmenau (Germany)
- 266 - 267
Using a specially developed combination of phase shifting and image processing algorithms will be performed a specific analysis of relatively rough and unknown surfaces (with or without structures). These algorithms are able to evaluate phase-shifted interference images and calculate topographic data from them. Interference images, which are used for the analysis, are acquired with the help of the high-precision nanopositioning and nano-measuring machine (NPMM-200) of the Technical University of Ilmenau [1, 2].