T4.1.1 - Ultra-compact MEMS gas analyzer based on ion-optical spectrometry
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- T4.1 - MEMS Gas Sensors
- Author(s)
- P. Szyszka, K. Stambulskyi, T. Grzebyk - Wroclaw University of Science and Technology, Wrocław (Poland)
- Pages
- 104 - 105
- DOI
- 10.5162/EUROSENSORS2025/T4.1.1
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
Here, we present handheld gas analyzer based on ion optical emission spectrometry (OES) applied ina miniature MEMS (micro-electro-mechanical system) structure. The instrument consists of in-house developed gas ionizer, playing simultaneously a role of high vacuum micropump which provides back-ground pressure of 1e-7 hPa, integrated with a needle type gas dosing valve and a compact optical spectrometer necessary to analyze optical emission of molecules ionized inside the chip. The total mass of all components (including electronics is 350 grams and can be assembled into instrument with volume of 0.2 U.