T4.1.4 - Ceramic MEMS Platforms for Metal Oxide Gas Sensors: Compatibility of Sensing Layers with Thick Film Materials
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- T4.1 - MEMS Gas Sensors
- Author(s)
- A. Vasiliev - Dubna State University, Dubna (Russia), O. Kul, A. Bolshakov - LLC “C-Component”, Moscow (Russia), A. Mokrushin - Kurnakov Institute of Inorganic Chemistry, Moscow (Russia), A. Shaposhnik - Voronezh State Agrarian University, Voronezh (Russia)
- Pages
- 108 - 109
- DOI
- 10.5162/EUROSENSORS2025/T4.1.4
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
The problem of the compatibility of the glass ceramic materials used in thick film technology and, inparticular, in ceramic MEMS technology, with sensing layers (SnO₂, TiO₂, In₂O₃, ZnO) was studied indetail. It was demonstrated that long term operation at high working temperature (up to 450ºC) and,especially, technological annealing of the sensing element at temperature up to 750ºC leads to thedissolution of the glass components in the sensing layer. The application of such elements as Bi andPb in the glass leads to the dramatic poisoning of the sensing layers.