T4.1.2 - MEMS-based microplasma sources for gas analysis
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- T4.1 - MEMS Gas Sensors
- Author(s)
- E. Vereshchagina, E. Escobedo-Cousin, K. Milenko, S. Zonetti, A. Ellingsen, D. C. H. Hoang - SINTEF Digital, Oslo (Norway), S. Dutta, T. -A. Nguyen-Le, C. D’Alessandro - Respiro B.V., Leiden (The Netherlands)
- Pages
- 106 - 107
- DOI
- 10.5162/EUROSENSORS2025/T4.1.2
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper presents the development of miniaturized microplasma sources for gas analysis based on micro-electromechanical systems (MEMS) technology. We discuss critical device design aspects, from FEM modeling and device concept to fabrication and experimental validation. A functional demonstrator was fabricated, and successful plasma ignition was achieved under controlled conditions. The results suggest that the developed microplasma sources hold strong potential as compact, integrable compo-nents for gas analysis systems in various industrial applications.