W7.2.2 - Improving Computational Efficiency of Finite Element MEMS Transducer Models by Fine-Tuned Homogenization
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- W7.2 - Theory, Design and Testing
- Author(s)
- S. Bielefeldt, F. Püntener, C. Rüttimann, C. Roman - ETH Zurich, Zurich (Switzerland)
- Pages
- 174 - 175
- DOI
- 10.5162/EUROSENSORS2025/W7.2.2
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
We present a top-down homogenization approach for simplifying the finite element (FE) model of a complex MEMS transducer, here a capacitive tactile sensor (taxel). This method addresses the challenge of high computational costs in modeling MEMS devices. The number of degrees of freedom (NDOF) of the homogenized model is reduced by a factor of 34.6. The model achieves a normalized root mean squared error (NRMSE) with respect to the meas-urement data of 5.5±0.5% for force- and of 9.4±1.5% for capacitance-displacement characteristics. Our method thereby achieves significant computational savings while maintaining accuracy of a non-homogenized model.