MP29 - Evaluation of a MEMS-based Absolute Humidity Sensor using Thermal Conductivity
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster I
- Chapter
- Gas Sensors
- Author(s)
- S. Emperhoff, J. Wöllenstein - Albert-Ludwigs-Universität, Freiburg (Germany), M. Eberl - Infineon Technologies AG, Neubiberg (Germany)
- Pages
- 261 - 262
- DOI
- 10.5162/EUROSENSORS2025/MP29
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
Thermal conductivity sensors, which are often used to measure gases such as hydrogen, are influencedby humidity changes. While this usually leads to challenges in compensating these effects, we are investigating thepotential of thermal conductivity sensors as humidity sensors. Using a gas mixing model from Melling, it is shownthat thermal conductivity sensors have limitations at low to medium humidity levels. In environments with hightemperatures and humidity, where common relative humidity sensors often have problems, thermal conductivitysensors offer a significant potential for accurate measurements.