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TP21 - Optimizing AC Excitation Frequency for Linear Complex Impedance Response in Metal Oxide Semiconductor Gas Sensing

Event
EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw
Band
Poster II
Chapter
Bio/chemical and Environmental Sensors
Author(s)
H. A. Imran, O. Brieger, C. Bur, A. Schütze - Lab for Measurement Technology Saarland University, Saarbruecken (Germany)
Pages
391 - 392
DOI
10.5162/EUROSENSORS2025/TP21
ISBN
978-3-910600-07-2
Price
free

Abstract

Metal Oxide Semiconductor (MOS) gas sensors are of high interest in gas detection applications due totheir high sensitivity and low cost. However, conventional read-out methods based on resistive measurements oftenexhibit a highly nonlinear response to gas concentration, limiting their effectiveness for accurate quantification.In this study, we present an alternative approach that leverages impedance spectroscopy to identify an optimalexcitation frequency at which the imaginary component of the impedance (Z′′) exhibits a highly linear correlationwith gas concentration. As a case study, we evaluate the AS-MLV-P₂ sensor under varying concentrations of ethanolgas. The proposed method demonstrates strong linearity, achieving an R₂ value of 98.26 % for a linear fit betweenthe mean of Z′′ over 35 frequency sweeps and Ethanol concentrations ranging from 10⁰⁰ ppb to 8000 ppb, at anexcitation frequency of 3.568 MHz.

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