TP27 - On the design of a magnetically driven quasi-static MEMS micromirror
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster II
- Chapter
- MEMS and MOEMS
- Author(s)
- P. Malagò, C. Fleury, S. Lumetti, L. Enger, S. Guerreiro, A. Piot, A. Lagosh - Silicon Austria Labs GmbH, Villach (Austria)
- Pages
- 403 - 404
- DOI
- 10.5162/EUROSENSORS2025/TP27
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper focuses on the design of a magnetic MEMS micromirror featuring linear and non-contact actuation, low-power, and compact size with respect to state-of-the-art magnetic micromirrors. The pro-posed device operates in the low-frequency regime and finds application in satellite and optical commu-nications. The results show that it is possible to realize a compact micromirror exhibiting performancesurpassing the state-of-the-art micromirrors employed in similar application fields.