TP31 - Modelling and Characterization of PZT-based High Performance PMUTs for In-Air Applications
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster II
- Chapter
- MEMS and MOEMS
- Author(s)
- A. Vogl, G. Sordo - SINTEF Digital, Oslo (Norway), L. Lidicky - Elliptic Laboratories ASA, Oslo (Norway)
- Pages
- 411 - 412
- DOI
- 10.5162/EUROSENSORS2025/TP31
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
Micro-Electromechanical systems (MEMS) structures using piezoelectric thin films have often delicate mechanical structures (e.g. membranes) combined with a thin-film stack consisting of electrodes, the piezoelectric material and other materials such as stress compensation layers. Analytical models have been developed for the design of a membrane structure that is used as piezoelectric micromachined ultrasound transducers (PMUT). The validity of this models has been checked with measurements ofthe devices. An example of a sensing application is presented.