TP33 - Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster II
- Chapter
- MEMS and MOEMS
- Author(s)
- M. Mortada, M. Schlögl, U. Schmid, M. Schneider - TU Wien, Vienna (Austria)
- Pages
- 417 - 418
- DOI
- 10.5162/EUROSENSORS2025/TP33
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
In this work, snap-through modes shapes of bistable piezoelectric micro-electromechanical devicesare presented based on a prior investigation of its parametric behavior. These devices make use of compressivealuminium nitride thin film in order to achieve bistability, hence the ability of switching between two ground states.