TP45 - MEMS Based Field Mill for Measuring Hybrid Electric Fields
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster II
- Chapter
- Physical Sensors
- Author(s)
- W. Hortschitz, G. Kovacs, F. Keplinger - University for Continuing Education Krems, Wiener Neustadt, (Austria)
- Pages
- 444 - 445
- DOI
- 10.5162/EUROSENSORS2025/TP45
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
In this paper we report a microsystem-based sensor system allowing measurement of static andlow-frequency electric fields. The micro-electro-mechanical system is electrostatically actuated in-plane. A micro-controller unit is incorporated for generating signals for excitation but also to evaluate the signal after amplificationvia a digital lock-in amplifier. It is successfully shown that the system can measure DC and AC electric fields.