TP46 - A High-Sensitivity Co-Oscillating Electrochemical Vector Hydrophone Based on Micron-Scale Controllable Microelectrodes
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster II
- Chapter
- Physical Sensors
- Author(s)
- H. Zhang, J. Wang, D. chen, Y. Lu - Aerospace Information Research Institute of Chinese Academy of Sciences(Beijing CHINA), University of Chinese Academy of Sciences(Beijing CHINA)
- Pages
- 446 - 447
- DOI
- 10.5162/EUROSENSORS2025/TP46
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper reports a novel co-oscillating electrochemical vector hydrophone with ~5 times highersensitivity than that of current best levels (peak sensitivity -166.36dB vs. -180.10dB REF 0dB=1V/µPa)within 1Hz~ 10⁰⁰Hz. This considerable improvement was due to the novel MEMS microelectrodeswhich featured with a micron-scale controllable spacing between the anode and cathode and largercathode area.