TP49 - Measurement of Vacuum Pressure with Resonators in the Closed-Loop Configuration
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster II
- Chapter
- Physical Sensors
- Author(s)
- J. Qin, X. Liu, J. Wang, D. Chen, B. Xie, Y. Lu, X. Huo - Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing (China), University of Chinese Academy of Sciences, Beijing (China)
- Pages
- 452 - 453
- DOI
- 10.5162/EUROSENSORS2025/TP49
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper proposes a vacuum resonant pressure sensor that is operated in the closed-loop configura-tion. The damping of MEMS resonator is related to its environment pressure, so the vacuum pressure sensor can be measured by the quality factor or vibration amplitude of resonator. In order to extend the lower limit, a comb-finger actuator is applied to drive the resonator. To enhance the performance, the resonator is operated in closed-loop and the amplitude ratio of detecting and driving signals are used as the output metric. The results show that the sensor can measure the pressure covers from 3.5E−4Pa to 10 Pa with a repeatability error of ±1.2% RD.