1.1.3 Optical Position Feedback for electrostatically driven MOEMS-Scanners
- 16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012
2012-05-22 - 2012-05-23
- 1.1 Mechanische Sensoren: MEMS-Sensoren
- A. Tortschanoff, D. Holzmann, M. Baumgart, A. Frank, A. Kenda - CTR Carinthian Tech Research AG, Villach (Österreich), T. Sandner, M. Wildenhain - Fraunhofer-Institut - IPMS -, Dresden
- 37 - 41
For MOEMS scanner mirrors which do not have intrinsic on-chip feedback, position information can be provided using optical methods, most simply by using a reflection from the backside of the mirror. The timing signals from precisely placed fast differential photodiodes can be used for resonant scanner mirrors performing sinusoidal motion with large amplitude. While this approach provides excellent accuracy it cannot be directly extended to arbitrary trajectories or static deflection angles. Another approach is based on the measurement of the position of the reflected laser beam with a quadrant diode. In this work, we present position sensing devices based on the latter principle showing first experimental results from the implemented devices.