1.1.4 MEMS Pirani type vacuum sensor with extended sensitivity range
- 16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012
2012-05-22 - 2012-05-23
- 1.1 Mechanische Sensoren: MEMS-Sensoren
- M. Simon, C. Dütsch, J. Schieferdecker, K. Storck - Heimann Sensor GmbH, Dresden, F. Völklein, M. Grau - Hochschule RheinMain, Rüsselsheim
- 42 - 47
Heimann Sensor together with RheinMain University of Applied Sciences have developed a new vacuum sensor with an extended measuring range. While most of conventional and MEMS Pirani type vacuum gauges detect pressures between 103 mbar and 10-3 mbar, the new sensor extends the measuring range down to 10-5 mbar. By using thermal simulations a chip has been designed where the nonpressure-dependent thermal conductance is significantly reduced. The results of sensor characterization are presented. A modified chip has been specially designed for measurements in the range from 103 mbar to 1 mbar. By integrating both chips in the same housing we provide a Pirani type vacuum sensor that shows a pressure-dependent signal from 103 mbar down to 10-5 mbar.