P1.4.7 Sensing Properties for the Hydrogen Micro Sensor with Modified Palladium Film
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P1.4 Nanostructured Sensors
- J. Yoon, B. Kim, J. Kim - Department of Materials Science and Engineering, University of Seoul (Korea)
- 997 - 1000
A micro hydrogen gas sensor platform was fabricated using a MEMS processes. A nano-bumpy structure was examined using a polystyrene aqueous suspension to develop the surface areas of sensing area (palladium thin film). The palladium film was deposited on the fabricated platform by a R.F. magnetron sputtering. The cross section of each AFM image was analyzed in terms of the mean surface roughness. The root-meansquare roughness of the nano-bumpy Pd structure was 9.07 nm whereas that of the Pd thin film was 0.98 nm. At hydrogen gas concentrations of 2,000 ppm, the sensitivity of the Pd thin film sensor and the Pd nano-bumpy sensor was 0.638 and 1.045, respectively. The sensitivity of the Pd nano-bumpy sensor was better than that of the Pd thin film sensor due to the very high surface-to-volume ratio of the nano-bumpy Pd structure.