P1.4.8 Nanostructured Materials Application in Construction of Microhumidity Sensors
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P1.4 Nanostructured Sensors
- M. Chuprin, O. Ivanova, S. Krutovertsev, A. Shevchenko, A. Tarasova - JSC "Ecological sensors and systems" (Russia)
- 1001 - 1004
Currently low moisture content measurement remains one of the most urgent tasks. Besides, the requirements in respect of trace amounts of moisture become stricter for many processes. Operation principle of the microhumidity sensor is based on a relationship between a capacity of doped silica film and an amount of humidity that is sorbed by it. Characteristics of thin nanostructured modified films that were produced by a hydrolytic polycondensation from tetraethoxysilane based solutions were studied. There are many technological factors that influence on adsorption value of films, such as: solution content, film formation conditions, temperature rate and technological environment influence. Influence of technological parameters on sensor characteristics was investigated. Special algorithm of signal processing was developed for temperature effect compensation on sensor's capacity. High sensitivity enables to use the sensors to measure humidity content for especially pure gases used in microelectronic technology, active gases at humidity content up to -80 oC by dew point and organic solvents.