P1.4.9 Improvement of Si Field Emission Sensors Fabrication Technology by Carbon Nanotubes
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P1.4 Nanostructured Sensors
- M. Dantas - Centro de Engenharia, Modelagem e Ciências Sociais Aplicadas (CECS) - UFABC (Brazil), E. Galeazzo, H. Peres, F. Ramirez-Fernandez - Laboratório de Microeletrônica (LME) - Escola Politécnica - Universidade de São Paulo - EPUSP (Brazil)
- 1005 - 1008
Field Emission (FE) devices were successfully improved by the association of silicon (Si) microtips and Multi-Walled Carbon Nanotubes (MWCNTs). MWCNTs were deposited over Si microtips by Electrophoretic Deposition (EPD), and improvements up to 80% in electron emission characteristics were reported, being suitable for the development of gas ionization sensors based on FE devices.