P2.7.9 TiO2 Nanohelix Gas Sensors with Enhanced Performance and Potential Application as a Building Block of Electronic Noses
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P2.7 Nanostructured Metal Oxide-based Sensors
- S. Hwang, H. Kwon, S. Chhajed, J. Im, S. Oh, J. Kim - Department of Materials Science and Engineering, POSTECH (Republic of Korea), J. Byon, J. Baik - School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST) (Republic of Korea), H. Jang, S. Yoon - Electronic Materials Center (Korea) Institute of Science and Technology (KIST) (Republic of Korea)
- 1626 - 1628
We present TiO2 nanohelix gas sensors with top-and-bottom electrodes configuration fabricated by oblique angle deposition (OAD) that is very simple, easy, and compatible with conventional microfabrication processes. The combination of large surface-to-volume ratio, extremely small size (~ 22 nm) with near single crystallinity of TiO2 nanohelices, together with the top-and-bottom electrodes configuration results in a huge enhancement in gas sensing performances including ~10 times higher sensitivity, ~5 times lower detection limit, and much faster response time than the conventional thin film device. By employing this simple, cheap, and easy method, e-nose, consisting of each sensor devices with various nanostructures and metal-oxides, can be realized, having the large freedom of tuning the sensitivity of each device.