P2.7.10 Individual Metal Oxide Nanowire contacted onto MEMS substrates for Monitoring of Toxic Species
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P2.7 Nanostructured Metal Oxide-based Sensors
- R. Jimenez-Diaz, J. Sama, P. Clapera, J. Prades, A. Romano-Rodriguez - Universitat de Barcelona (UB), MIND-IN2UB-Dept. Electronics (Spain), F. Hernandez-Ramirez - Universitat de Barcelona (UB) (Spain) and IREC (Catalonia Institute for Energy Research) (Spain), J. Santander, I. Gracia, C. Calaza, L. Fonseca, C. Cané - Institut de Microelectrònica de Barcelona, IMB-CNM-CSIC, Campus UAB (Spain)
- 1629 - 1632
Metal oxide nanowires are used for their integration in gas nanosensors. These semiconducting nanowires are deposited onto suspended sensing platforms and are electrically contacted (a single nanowire in each substrate) by means of electron beam induced deposition inside a FIB dual beam system. The platforms are equipped with a buried integrated resistor that permits their heating, allowing to tune the reactio n of the gas species with the surface of the nanowire, thus controlling the response. These low power consumption nanosensor prototypes exhibit good responses to toxic gases, like CO, NOx and O3, making them suitable for environmental monitoring.