P2.7.10 Individual Metal Oxide Nanowire contacted onto MEMS substrates for Monitoring of Toxic Species

Event
14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany
Chapter
P2.7 Nanostructured Metal Oxide-based Sensors
Author(s)
R. Jimenez-Diaz, J. Sama, P. Clapera, J. Prades, A. Romano-Rodriguez - Universitat de Barcelona (UB), MIND-IN2UB-Dept. Electronics (Spain), F. Hernandez-Ramirez - Universitat de Barcelona (UB) (Spain) and IREC (Catalonia Institute for Energy Research) (Spain), J. Santander, I. Gracia, C. Calaza, L. Fonseca, C. Cané - Institut de Microelectrònica de Barcelona, IMB-CNM-CSIC, Campus UAB (Spain)
Pages
1629 - 1632
DOI
10.5162/IMCS2012/P2.7.10
ISBN
978-3-9813484-2-2
Price
free

Abstract

Metal oxide nanowires are used for their integration in gas nanosensors. These semiconducting nanowires are deposited onto suspended sensing platforms and are electrically contacted (a single nanowire in each substrate) by means of electron beam induced deposition inside a FIB dual beam system. The platforms are equipped with a buried integrated resistor that permits their heating, allowing to tune the reactio n of the gas species with the surface of the nanowire, thus controlling the response. These low power consumption nanosensor prototypes exhibit good responses to toxic gases, like CO, NOx and O3, making them suitable for environmental monitoring.