FE.5 - Fabrication of flexible gas sensor based on tin oxide by inkjet printing technology
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- Field-Effect Sensors
- Author(s)
- O. Kassem, M. Rieu, J. Viricelle - École Nationale Supérieure des Mines, Saint-Étienne (France), M. Saadaoui - Ecole Nationale Supérieure des Mines de Saint Etienne, Gardanne (France)
- Pages
- 431 - 432
- DOI
- 10.5162/IMCS2018/FE.5
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
In this work, a flexible tin oxide (SnO2) gas sensor was successfully fabricated by inkjet printing technology. This thin film deposition technique requires the formulation of stable suspensions with specific fluidic properties. Sol-gel method was applied to synthesize a stable sol based on tin oxide, then transformed into ink with the appropriate rheological properties to be printed using a drop-ondemand piezoelectric inkjet printer. Thermal analysis by TGA/DSC and microstructural analysis by XRD of synthetized sol show that a crystallized structure of SnO2 could be obtained at 350°C, which is lower than crystallization temperatures of SnO2 previously reported in the literature, and entirely consistent with our plastic substrate. The printed thin-film was then sintered at 350°C on a flexible plastic (Upilex-50S).