M2.2.1 - A novel piezoelectric MEMS speaker with push-pull actuation for in-ear applications
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M2.2 - MEMS
- Author(s)
- F. Cerini, S. Adorno - STMicroelectronics, Cornaredo (Italy), C. Gazzola, F. P. Perli, M. Rosso, A. Corigliano - Politecnico di Milano, Milano (Italy)
- Pages
- 66 - 67
- DOI
- 10.5162/EUROSENSORS2025/M2.2.1
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This work introduces an innovative high-performance push-pull piezoelectric Micro-Electro-MechanicalSystem (MEMS) loudspeaker for in-ear applications. It consists of a diaphragm featuring narrow slits and covered with two distinct piezoelectric patches that are actuated with a 180° out-of-phase sinusoidal signals to increase its maximum displacement. The device delivers a Sound Pressure Level (SPL) of up to 10⁹.5 dB SPL from 10⁰ Hz onward with an excitation of 30 Vpp, shows a Total Harmonic Distortion (THD) of 0.8% at 1 kHz and at 94 dB SPL, and maintains a compact square footprint of 4.5 x 4.5 mm².