M2.2.2 - Advancing On-Chip Micromotor Fabrication Through Electrochemical Micromachining of Silicon
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M2.2 - MEMS
- Author(s)
- F. Abazar, S. Surdo, C. Cozzi, G. Polito, G. Barillaro - University of Pisa, Pisa (Italy)
- Pages
- 68 - 69
- DOI
- 10.5162/EUROSENSORS2025/M2.2.2
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper presents the first fabrication of interlocked microgears etched in silicon chips using electro-chemical micromachining (ECM). These microgears represent a major step toward the development of fully integrated silicon-based micromotors. The ability to fabricate freestanding rotors around stationary stators with sub-micrometric precision with a single-step ethching surpasses the capabilities of existing micromachining technologies. As proof of concept, we demonstrate the integration these microgearswithin a microfluidic channel designed for transduction of flow motion into rotational speed.