Mo-BBS-08 - MEMS-Based Flexible NiTi Shape Memory Alloy Micro Actuator for Cochlear Electrode Applications

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Biosensors/-electronics And Biomimetic Sensors

Author(s)

P. Ormancı, H. Külah - Middle East Technical University,Ankara (Turkey)

Pages

350 - 351

DOI

10.5162/eurosensors2026/Mo-BBS-08

ISBN

978-3-910600-12-6

Price

free

Abstract

This work presents a MEMS-based flexible NiTi micro actuator using co-sputtered thin films for cochlear electrode applications. Film composition was tuned to Ni 51.3 Ti 48.7 by adjusting Ti sputtering power, followed by vacuum annealing at 400°C for 2 hours. Crystallization was confirmed by XRD, and EDX verified composition. The films exhibit a two-way shape memory effect with reversible actuation around 65 °C, demonstrating potential for integration into biomedical MEMS systems.