5.2.3 Design and Fabrication of a Novel 3D Micropellistor
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- 5.2 Novel Sensing Principles
- L. Xu, X. Gao, T. Li, Y. Wang - State Key Laboratory of Transducer Technology, Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science (China)
- 440 - 443
This paper presents a novel 3D micropellistor based on a 3D microheater. The 3D microheater with a Pt heater embedded in a concave-shaped active area was fabricated by MEMS technology. Then a detector and a compensator was developed by sol-gel process, introducing Pd as the catalytic metal a nd porous alumna as thereference material. Test results indicate that the 3D catalytic micropellistor has a output voltage of 12 mV to 10% LEL methane. And it has a very high sensitivity, fast response time and liner output voltages.