P1.9.25 Thermal creep study in a gas detection microsystem
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P1.9 Technology and Application
- V. Laithier, I. Graur, S. Bernardini, M. Bendahan, K. Aguir, P. Perrier - Aix-Marseille Université, Marseille (France)
- 1236 - 1239
Our research work aims to develop a gas detection fluidic microsystem. The proposed microsystem is composed of a gas microsensor inserted into a microchannel. By the microsensor heater, a pumping is created due to the thermal creep effect. Thus, the gas is led to the sensor with a controlled flow rate. The study of the pumping effect generation has been realized by thermal and microfluidic simulations. Firstly, the microsystem thermal simulations have been performed to choose the most adapted material to obtain a sufficient thermal gradient and to estimate it along the microchannel. Then, the microfluidic model has been done using these results. These simulations let us to determine the mass flow rate values for different thermal gradient profiles.