P2.4.3 Thermally-oxidized nanowires for chemical sensing
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P2.4 Nanostructured Sensors
- D. Zappa, E. Comini, G. Sberveglieri - Sensor Laboratory, Dept. of Chemistry and Physics (Italy)
- 1504 - 1506
Nanostructured materials are subject of an intensive scientific research because of their interesting properties and potential technological applications.In particular, metal oxides (MOx) have been largely studied in literature as potential materials to fabricate next generation of chemical sensors, mainly due to their small dimensions, low cost and compatibility with silicon technology. In this study metal oxide nanowires were grown by thermal oxidation of metallic thin layer deposited by sputtering on alumina and silicon substrates. Both n-type (ZnO) and p-type (CuO) nanowires were grown. Then, mat-based conductometric chemical sensing devices were prepared and the response was evaluated towards different chemical species, in order to highlight the electrical properties of the materials. Calibration curves for the detection of some target gases were estimated.