P2.4.10 SnO2 NWs-based sensor prototype for low temperature formaldehyde detection
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- P2.4 Nanostructured Sensors
- I. Castro-Hurtado, G. Mandayo, J. Gonzalez de Chávarri, E. Castaño - Ceit and Tecnun (Spain), I. Gracià, C. Cané, E. Figueras, M. Salleras - Centro Nacional de Microelectrónica, IMB-CSIC, Campus UAB (Spain)
- 1528 - 1531
In this work the sensing properties of SnO2 NWs were studied and a high sensor response and short response and recovery times were obtained, even at operating temperatures as low as 130 ºC. Also the influence of relative humidity on the sensor response was determined and a good selectivity to three interfering gases ammonia (NH3), benzene (C6H6) and carbon dioxide (CO2) was measured. The SnO2 NWs have been grown in-situ first over an alumina substrate with a heater on the back side, and also on a micro-hotplate structure.