P2.9.25 Design and testing of a IMS-cell detector (with MEMS technology)

Event

14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany

Chapter

P2.9 Technology and Application

Author(s)

J. Ortiz, C. Nigri, C. Ruiz, A. Lamagna - Comisión Nacional de Energía Atómica (Argentina), G. Ortiz - Universidad Nacional del Nordeste (Argentina), C. Lasorsa - Universidad Tecnológica Nacional, FRH (Argentina)

Pages

1773 - 1775

DOI

10.5162/IMCS2012/P2.9.25

ISBN

978-3-9813484-2-2

Price

free

Abstract

We propose a compact design of a IMS-cell detector. The aim of this work is to study and testing an option of IMScell detector made with micro-fabrication technology, the detection mechanism relies on the mobility of ions inside a chamber. Our Microsystems has a channel where enter the gas to analyze continuously, in the first part of the channel gas is ionized (glow-discharge), the fluid continues its movement to the detection area where a series of condensers to which an electric field is applied to him to a tension forming that obtains deflection of the trajectory of ions according to its mobility. The device uses the detection model called cross-flow.