P2.9.29 Real time detection of volatile organic compounds through a chemocapacitor system
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P2.9 Technology and Application
- Author(s)
- E. Valamontes, G. Patsis - Electronics Engineering department, Technological Institute of Athens Egaleo (Greece), D. Goustouridis, A. Botsialas - Electronics Engineering department technological Institute of Piraeus Athens (Greece), P. Oikonomou, I. Raptis - Institute of Microelectronics, NCSR 'Demokritos' Athens (Greece), M. Sanopoulou - Institute of Physical Chemistry NCSR 'Demokritos' Athens (Greece)
- Pages
- 1787 - 1789
- DOI
- 10.5162/IMCS2012/P2.9.29
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
A hybrid gas sensing module consisting of an array of 8 polymer coated capacitive sensors and low power read-out electronics at 10cm2 footprint is introduced. The chemocapacitor array is fabricated with standard silicon processes allowing for the realization of 2µm InterDigitated Electrodes (IDEs). The electronics part consists of an analog multiplexer for the sequential measurement of the sensor array elements, a capacitance to 24-bit converter and a USB to I2C interface. The electronic submodule is able to detect 0.6fF capacitance changes. The compact module was successfully applied in the detection of 30ppm p-xylene and 90ppm toluene in the presence of humidity.