B6.3 HTCC multilayer based ion sensitive sensors for water analysis
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- B6 Chemical Sensors for Water Analysis
- C. Feller, U. Partsch, S. Körner - Fraunhofer Institute for Ceramic Technologies and Systems (IKTS), Dresden (Germany)
- 139 - 140
Based on a microsystem technology approach, electrochemical sensors for analysis of H+, NH4+, K+, Ca2+ and Cu2+ ion concentrations were developed. Starting from a suitable material and process de-velopment ion-sensitive thick-film membranes were deposited on a ceramic HTCC multilayer sensor platform. All ion-sensitive electrodes ISEs have a very good response behavior and high sensitivity in the examined measuring range. Thus the ceramic multilayer technology provides as a suitable method to prepare robust and miniaturized multi-sensor for water analysis.