| SMSI 2020 |
A6.1 Design, Simulation, Fabrication and Characterization of piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications |
A. Mehdaoui, C. Huber, J. Becker, F. Schraner - TrueDyne Sensors AG, Reinach BL (Switzerland), L. Villanueva - Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland) |
| SMSI 2020 |
A6.2 Applications of Tactile Microprobes for Surface Metrology |
C. Reuter, M. Holz, A. Reum - nano analytik GmbH, Ilmenau (Germany), M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), M. Hofmann, I. Rangelow - Technische Universität Ilmenau, Ilmenau (Germany) |
| SMSI 2020 |
A6.3 Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe |
M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany) |
| SMSI 2020 |
A6.4 A MEMS micromachined detector platform for kW power radiation in a wide spectral range |
A. Laades, S. Görlandt, C. Heinze, F. Machalett, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany) |