C6.3 Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- C6 Optical Sensors and Measuring Systems
- Y. Wu, E. Wirthmann, U. Klöpzig, T. Hausotte - Friedrich-Alexander-Universität Erlangen-Nuremberg, Erlangen (Germany)
- 191 - 192
This article presents a new metrological atomic force microscope (MAFM) with adjustable beam posi-tion and direction of the cantilever measuring system. An interferometric measurement system measures the position of the cantilever and a quadrant photodiode detects the bending and torsion of the cantilever. To improve the signal quality and reduce disturbing interferences, the optical design was changed in comparison to the system of [3, 4]. The integration of the MAFM in the nanomeasur-ing machine (NMM-1) offers the possibility of large-scale measurements over a range of 25 mm × 25 mm × 5 mm with subnanometre resolution. A large number of measurements have been performed by this MAFM in combination with the NMM-1. In this short paper, examples of these measurements for determination of step height and pitch and the measurement of an area are demonstrated.