A5.3 - Differential Thermal Conductivity Hydrogen Sensor
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- A5 - Hydrogen Sensing
- Author(s)
- S. Emperhoff, F. Brandl, M. Eberl, J. Perez Barraza - Infineon Technologies AG, Regensburg (Germany), J. Wöllenstein - University of Freiburg, Freiburg (Germany)
- Pages
- 65 - 66
- DOI
- 10.5162/SMSI2023/A5.3
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
In this work, a thermal conductivity sensor for the detection of hydrogen in fuel cell applications is presented. The sensor uses a differential measuring concept with two cavities combined on one semiconductor-die where one of those cavities is hermetically sealed and filled with nitrogen as a reference gas. The sensors were characterized with hydrogen concentrations between 0 and 3.5 % at different heater temperatures. A 3σ-noise level of 0.06 % hydrogen was achieved with the prototype sensor.