| SMSI 2023 |
D6.1 - Multiplexing interferometers to provide novel capabilities for nanometrology |
T. Kissinger - Technische Universität Ilmenau, Ilmenau (Germany) |
| SMSI 2023 |
D6.2 - Measuring sub nanoradian angles |
A. Yacoot - National Physical Laboratory, Teddington (United Kingdom), S. Alcock, R. Ince, H. Patel - Diamond Light Source, Didcot (United Kingdom) |
| SMSI 2023 |
D6.3 - Recent progress on AFM te chniques for traceable 3D nanometrology at PTB |
G. Dai, J. Thiesler, J. Degenhardt - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), R. Tutsch - Technical University of Braunschweig, Braunschweig (Germany) |
| SMSI 2023 |
D6.4 - Current advances in 3D tip- and laserbased nanofabrication in extended working areas |
I. Ortlepp - Technische Universität Ilmenau, Ilmenau (Germany) |