C3.4 - Everything at once—Linearizing System Response and Enhancing Sensitivity in Photoacoustic Gas Sensors by Demodulation and Filter Tuning
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- C3 - Photo Acustic Gas Sensors
- Author(s)
- S. Essing, G. Schrag - Technical University of Munich, München (Germany), D. Tumpold, G. Dumas, M. Ghaderi - Infineon Technologies AG, Neubiberg (Germany), A. Kravchenko - Infineon Technologies Dresden GmbH, Dresden (Germany)
- Pages
- 163 - 164
- DOI
- 10.5162/SMSI2023/C3.4
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
We present a sophisticated method to improve the sensitivity of CO2-detecting non-resonant MEMS-based photoacoustic gas spectroscopy systems by more than 50 % compared to state-of-the-art ap-proaches. The method based on signal demodulation can also be used to linearize the measured system’s response in order to reduce the calibration effort for future sensors. Tuning the filter transmission spectra accordingly is utilized to further increase the linearity of the system response and enhancing the sensitivity by more than 200 %.