D6.4 - Current advances in 3D tip- and laserbased nanofabrication in extended working areas
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- D6 - Nanomeasurements and Nanofabrication
- Author(s)
- I. Ortlepp - Technische Universität Ilmenau, Ilmenau (Germany)
- Pages
- 245 - 246
- DOI
- 10.5162/SMSI2023/D6.4
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
Nanotechnology is affecting almost all areas of life, from semiconductor industry to optics, medicine and agriculture. Classical methods for sensing, measuring and fabricating on the nanoscale are faced with new challenges: features are getting smaller and the variety of structures and materials is increasing. Thus, many new techniques are developed in this field. Research at the Technische Universität Ilmenau aims to support transferring these new technologies to industrial scale for future application. The focus is on tip- and laser-based processes together with devices for nanometer positioning.