E7.3 - Development of a Chromatic Confocal Sensor Model Dedicated to Investigating Object-Dependent Effects
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- E7 - New Measurement and Sensor Approaches
- Author(s)
- D. Linnert, U. Neuschaefer-Rube - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), M. Stavridis - Physikalisch-Technische Bundesanstalt, Berlin (Germany)
- Pages
- 276 - 277
- DOI
- 10.5162/SMSI2023/E7.3
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
In optical dimensional metrology object-dependent systematic effects significantly influence measurements and limit traceability. With the aim to describe and if possible correct systematic effects and estimate task-specific measurement uncertainties, PTB developed a virtual instrument that allows to consider the influence of the specimen. Early simulations show such effects.