| SMSI 2020 |
A6.1 Design, Simulation, Fabrication and Characterization of piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications |
A. Mehdaoui, C. Huber, J. Becker, F. Schraner - TrueDyne Sensors AG, Reinach BL (Switzerland), L. Villanueva - Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland) |
| SMSI 2020 |
A6.2 Applications of Tactile Microprobes for Surface Metrology |
C. Reuter, M. Holz, A. Reum - nano analytik GmbH, Ilmenau (Germany), M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), M. Hofmann, I. Rangelow - Technische Universität Ilmenau, Ilmenau (Germany) |
| SMSI 2020 |
A6.3 Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe |
M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany) |
| SMSI 2020 |
A6.4 A MEMS micromachined detector platform for kW power radiation in a wide spectral range |
A. Laades, S. Görlandt, C. Heinze, F. Machalett, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany) |
| SMSI 2020 |
B1.1 Hydrogen-Sensors for Selected Fuel Cell Applications |
O. Kiesewetter - UST Umweltsensortechnik GmbH, Geschwenda (Germany) |
| SMSI 2020 |
B1.2 Sensitivity and Selectivity of Pd based Thin Film Hydrogen Sensors |
M. Wienecke, L. Godenrath, M. Hoffmann - Materion GmbH, Wismar (Germany), J. Heeg - Hochschule Wismar, Wismar (Germany) |
| SMSI 2020 |
B1.3 Development and characterization of a miniaturized hydrogen gas sensor system for safety monitoring |
P. Sood, M. Mertig - Kurt-Schwabe-Institut für Mess- und Sensortechnik Meinsberg e.V., Waldheim (Germany), J. Zosel - Technische Universität Dresden, Dresden (Germany), O. Herrmann, M. Woratz - ACI Analytical Control Instruments GmbH, Berlin (Germany) |
| SMSI 2020 |
B1.4 Microstructural Investigations of Blackening in YSZ Sensors for Hydrogen Coulometry |
A. Graff, W. Münchgesang, F. Altmann - Fraunhofer Institute for Microstructure of Materials and Systems, Halle (Germany), C. Himcinschi, T. Köhler - Technische Universität Bergakademie Freiberg, Freiberg (Germany), P. Sood, J. Zosel, M. Mertig - Kurt-Schwabe-Institut für Mess- und Sensortechnik Meinsberg e.V., Waldheim (Germany) |
| SMSI 2020 |
B2.1 Monitoring of Pumps and Valves in Fluidic Systems with Electro-Magnetic Flowmeters |
J. Förster, T. Fritsch, J. Friderich - KROHNE Innovation GmbH, Duisburg (Germany), R. Gentemann, R. Vonnahme - WILO SE, Dortmund (Germany) |
| SMSI 2020 |
B2.2 A hermetic sensor concept for measuring fluid flows |
P. Radler, J. Ringkamp, P. Lebhardt, J. Langejürgen - Fraunhofer IPA, Mannheim (Germany) |
