A6.3 Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- A6 MEMS Sensors
- M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany)
- 89 - 90
In this work, a long slender MEMS cantilever sensor for higher-order contact resonance tactile-sensing applications is described. The design is focused on enabling high-speed measurements on large workpieces. To excite high-order out-of-plane bending modes of the cantilever, heating resistors integrated into the sensor are used as actuators. Their positions are optimized to allow for an efficient resonant excitation of the sensor, as confirmed by finite-element modelling (FEM).