A6.4 A MEMS micromachined detector platform for kW power radiation in a wide spectral range
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- A6 MEMS Sensors
- A. Laades, S. Görlandt, C. Heinze, F. Machalett, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- 91 - 92
The focus of the development is on a silicon membrane based thermal detector for radiation extending from the infrared to the extreme ultraviolet (XUV) featuring very high powers in the range 100 W to 5 kW. The thermal radiation detector is equipped with a sensor platform chip consisting of an appropriate absorber and a silicon-based temperature sensor unit. This approach allows the radiation to be efficiently absorbed and converted into heat in the absorber leading to a local increase in temperature and a detectable temperature difference in the silicon unit.