A6.2 Applications of Tactile Microprobes for Surface Metrology
- Event
- SMSI 2020
-
(did not take place because of Covid-19 virus pandemic) - Band
- SMSI 2020 - Sensors and Instrumentation
- Chapter
- A6 MEMS Sensors
- Author(s)
- C. Reuter, M. Holz, A. Reum - nano analytik GmbH, Ilmenau (Germany), M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), M. Hofmann, I. Rangelow - Technische Universität Ilmenau, Ilmenau (Germany)
- Pages
- 87 - 88
- DOI
- 10.5162/SMSI2020/A6.2
- ISBN
- 978-3-9819376-2-6
- Price
- free
Abstract
In this paper we discuss the capabilities of micromachined piezoresistive silicon cantilevers regarding their application for surface metrology [1]. Measurements were performed using contact-mode Atomic Force Microscopy (AFM) and contact-resonance mode, respectively [2]. The contact-mode AFM measurements were carried out inside a Scanning Electron Microscope (SEM) vacuum chamber enabling correlative scanning probe and electron microscopy.