A6.1 Design, Simulation, Fabrication and Characterization of piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- A6 MEMS Sensors
- A. Mehdaoui, C. Huber, J. Becker, F. Schraner - TrueDyne Sensors AG, Reinach BL (Switzerland), L. Villanueva - Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland)
- 85 - 86
A MEMS cantilever based resonant device for gas monitoring actuated and sensed piezoelectrically, has been designed, simulated, fabricated and tested. Aluminum Nitride (AlN) has been used as active material to implement the piezoelectric actuator and sensor. Simulation performed using COMSOL and measurements show a very good agreement. The final system, the full sensor for gas monitoring, allows the measurement of gas density and viscosity at temperatures between 0 and 60 °C and pres-sures between 1 and 10 bar abs. with accuracies of <0.03 kg/m3 and 6% respectively. A second tech-nological run that aims to improve the viscosity accuracy is ongoing.