P2.2.1 An Integrated Passive Impedance-loaded SAW Sensor
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P2.2 Resonant Sensors
- Author(s)
- W. Luo, J. Deng, Q. Fu, D. Zhou, S. Gong - Department of Electronic Science and Technology, Huazhong University of Science and Technology (China), G. Yan - Department of Electronics and Information Engineering, Huazhong University of Science and Technology (China)
- Pages
- 1403 - 1406
- DOI
- 10.5162/IMCS2012/P2.2.1
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
An integrated passive impedance-loaded SAW H2S sensor working at low temperature has been presented in this paper. The sensor consists of a SAW delay line and a resistive H2S sensor as impedance-loaded sensor connected to an SAW IDT. The SAW delay line is fabricated on a 128° LiNbO3 substrate and its center frequency is 233 MHz. The resistive sensor composed of the nanocrystalline SnO2 film and Al electrodes is also fabricated on the same substrate. The gas sensing properties of the resistive H2S sensor is tested separately. . In order to maximize the sensitivity of the whole sensor, the resistance of the impedance-loaded sensor may be adjusted to match to the out impedance of the SAW IDT by changing the resistance of the Sb-doped SnO2 nano-crystalline films and optimizing the electrodes structure.