P2.2.13 Enhanced Love Wave Effect on STW Resonator by ZnO layer for sensor application

Event

14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany

Chapter

P2.2 Resonant Sensors

Author(s)

J. Hu, Y. Jiang, . Du, H. Jing, G. Xie - University of Electronic Science and Technology of China (P. R. China)

Pages

1444 - 1446

DOI

10.5162/IMCS2012/P2.2.13

ISBN

978-3-9813484-2-2

Price

free

Abstract

Surface transverse wave(STW) resonator was evaluated for the potential use in detecting dimethyl methyl phosphonate (DMMP) vapors. The device's noise was decreased by the resonator's low insertion loss and high Q value, while a ZnO wave guide layer was coated on the STW device surface to generate Love wave effect, which enhanced the mass sensitivity of the device. Those contributed to improving the limit of detection(LOD) of sensor. The DMMP sensor is obtained by coating a sensitive layer on the device. The maximum mass sensitivity of 625cm2 g-1 was obtained and the sensitivity to DMMP vapor was further ehanced by increasing the sensitive layer thickness, which benefited from the low insertion loss of STW device, thus a response of about 5.5kHz upon exposure to 0.1mg/m3 DMMP vapor was obtained.