P2GS.5 - Fabrication and Characterization of C2H2 Gas Sensor Based on PdO doped In2O3 as Prepared by Flame Spray Pyrolysis

17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria
P-2 - Gas Sensors
K. Inyawilert, C. Liewhiran - Department of Physics and Materials Science, Faculty of Science, Chiang Mai University, Chiang Mai (Thailand), A. Wisitsoraat - Nanoelectronics and MEMS Laboratory, National Electronics and Computer Technology Center, National Science and Technology Development Agency, Pathumthani (Thailand), S. Phanichphant - Materials Science Research Center, Faculty of Science, Chiang Mai University, Chiang Mai (Thailand)
779 - 780


0 1.0wt% PdO doped In2O3 nanoparticles have been successfully produced in a single step by flame spray pyrolysis (FSP) technique using indium(III) nitrate hydrate and palladium(II) acetylacetonate, as precursors dissolved in ethanol and their acetylene sensing characteristics have been investigated. The particle and sensing film properties were analyzed by XRD, BET, TEM and XPS. The sensing films were prepared by spin coating technique. The crystallite sizes of In2O3 spherical and cubic morphologies were found to be ranging from 5 to 20 nm and PdO might form solid solution with In2O3 lattice. Gas-sensing characterization were studied at the operating temperatures ranging from 200 to 400 C in dry air, acetylene sensing characteristics of In2O3 nanoparticles is significantly improved as Pd content increased from 0 to 1.0wt.%. The 0.75wt% PdO doped In2O3 sensing film showed an optimum C2H2 response of 948 at 3% acetylene concentration and 350 C operating temperature. In addition, PdO doped In2O3 sensing films exhibited good selectivity towards hydrogen and gas.